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Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
For UHP gas delivery
High inlet pressure type: standard Max. 1700 psig (11.7MPa); HR (option) Max. 3000 psig (20.7 MPa)
Flow capacity: standard to 800 slpm; HF (option) to 1000 slpm; FC (option) to 1500 slpm
Body material: 316L SS secondary remelt
Hastelloy internals available for corrosion resistence
Tied-diaphragm design
Point of use and source cylinder applications
Options in:
Gray
are not compatible with other selected option value.
Red
conflict with another selected option value.
Amber
are not recommended.
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