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HRZ, High Performance Specialty Chiller, Double Inverter Type

product_img

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. This model includes an energy-saving inverter compressor and inverter pump, achieving lower power consumption and requiring a lower average flow rate of facility water for refrigerant heat extraction. 10 kW of cooling capacity is available at 20°C coolant set point. Multiple coolant types can be selected for this model.

  • Cooling capacity: 10kW
  • Temperature range setting:
    -20 to 90°C (fluorinated or ethylene glycol coolants)
    -10 to 60°C (clear or deionized water coolant)
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC / 50Hz or 3-phase 200~208 VAC / 60Hz
  • Standards: CE, UL, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)
Configuration Options
  
 
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Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Circulating Fluid Configuration Status
Option Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Sivo nije kompatibilno sa drugim izabranim vrednostima.
  • Crveno neusaglašeno je sa drugom izabranom vrednošću.
  • Narandžasto nije preporučeno.

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