XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal

XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal.  The XL* family shares common features with all series members.  Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body.  The body offers excellent resistance to fluorine corrosion.  A low sputtering yield and the absence of heavy metals avoid wafer contamination.

• Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
• High corrosion resistance to fluorine gas
• Minimal outgassing
• Minimal contamination from heavy metals
• Optional heaters
• Optional position sensors
• Optional oxalic acid anodizing for internals