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AZ3652 & AZ4652, Diaphragm Valve, Manually Operated

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Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated.

  • Cleaned for high purity semiconductor applications
  • Cleanroom assembled and Helium leaked tested
  • Valve meets dimensional requirements of SEMI F36-0299, Option 1
  • User-friendly forged body
  • Compact and lightweight
Configuration Options
  
 
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Select values from the drop down lists or make appropriate selections to configure the part number.
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Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • 灰色 与其他选定的选项值不兼容。
  • 红色 与另一个选定的选项值冲突。
  • 琥珀色 不推荐

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