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XLJ, Vacuum Angle Valve w/Release Valve

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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • Compatible with inert gases
  • Flange sizes: 25 and 40
  • Operating pressure range: Atmospheric to 0.01 Pa
  • Operating temperature: 5-40°C
  • Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC
Configuration Options
  
 
Copy Configuration Number Copy Configuration Number
Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Rated Voltage Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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