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AZ10PA, Pneumatic Actuation Pressure Regulator, Low Flow

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Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.
  • Actuation control pressure isolated from process gas by two seals
  • Body material: 316L SS
  • High inlet pressure type: Standard Max. 3500 psig (24.1 MPa)
  • Flow capacity: Standard to 30 slpm; HF to 120 slpm 
  • Ni-Cr-Mo alloy internals available for corrosion resistance
  • 100 psig (0.69 MPa) outlet pressure achievable with 80 psig (0.55 MPa) control pressure or less
Configuration Options
  
 
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Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Material Configuration Status
Surface Finish Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Inlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Flow Specification Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.
Options in:
  • 灰色 与其他选定的选项值不兼容。
  • 红色 与另一个选定的选项值冲突。
  • 琥珀色 不推荐

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